Mr. Koichi Kido Profile

Koichi Kido

at Rohm Co., Ltd.

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Author

Publications (2)

Proceedings Article | 11 March 2002 Paper

Development of refined cleaning technique focusing on ecological viewpoint

Koji Tange, Yoshikazu Nagamura, Kunihiro Hosono, Yuki Oomasa, Koichi Kido, Atsushi Hayashi, Yasutaka Kikuchi, Ichiro Imagawa, Yuichi Matsuzawa, Hozumi Usui

Proceedings Volume 4562, (2002) https://doi.org/10.1117/12.458332

KEYWORDS: Particles, Transmittance, Chromium, Water, Scanning probe microscopy, Hydrogen, Photoresist processing, Excimers, Reflectivity, Optical properties

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Proceedings Article | 5 September 2001 Paper

Development of refined cleaning technique focusing on an ecological viewpoint

Koji Tange, Yoshikazu Nagamura, Kunihiro Hosono, Yuki Oomasa, Koichi Kido, Atsushi Hayashi, Yasutaka Kikuchi, Ichiro Imagawa, Yuichi Matsuzawa, Hozumi Usui

Proceedings Volume 4409, (2001) https://doi.org/10.1117/12.438375

KEYWORDS: Particles, Transmittance, Chromium, Scanning probe microscopy, Excimers, Water, Optical properties, Photoresist processing, Reflectivity, Industrial chemicals

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