Dr. Kirk W. Brown Profile

Dr. Kirk W. Brown

Applications Engineer

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Publications (2)

Proceedings Article | 16 June 2003 Paper

Calibration of EUV 2D photoresist simulation parameters for accurate predictive modeling

Stewart Robertson, Patrick Naulleau, Donna O'Connell, Kevin McDonald, Todd Delano, Kenneth Goldberg, Steven Hansen, Kirk Brown, Robert Brainard

Proceedings Volume 5037, (2003) https://doi.org/10.1117/12.499357

KEYWORDS: Photomasks, Photoresist materials, Extreme ultraviolet lithography, Lithography, Calibration, Data modeling, Diffusion, Modeling, Extreme ultraviolet, Wafer-level optics

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Proceedings Article | 24 July 2002 Paper

Factors influencing the properties of fluoropolymer-based resists for 157-nm lithography

Gary Taylor, Cheng-Bai Xu, Gary Teng, JoAnne Leonard, Charles Szmanda, William Lawrence, Sassan Nur, Kirk Brown, Al Stephen

Proceedings Volume 4690, (2002) https://doi.org/10.1117/12.474261

KEYWORDS: Absorbance, Polymers, Lithography, Silicon, Etching, Absorption, Plasma etching, Resistance, Reflectivity, Optical lithography

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