Mr. Kelly O'Brien Profile

Kelly O'Brien

Senior Applications Development Engineer at KLA Oregon

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Publications (2)

Proceedings Article | 24 March 2009 Paper

Advanced modeling strategies to improve overlay control for 32-nm lithography processes

Anna Minvielle, Lovejeet Singh, Jeffrey Schefske, Joerg Reiss, Eric Kent, Terry Manchester, Brad Eichelberger, Kelly O'Brien, Jim Manka, John Robinson, David Tien

Proceedings Volume 7272, 72722X (2009) https://doi.org/10.1117/12.814256

KEYWORDS: Semiconducting wafers, Data modeling, Overlay metrology, Scanners, Radium, Lithography, Visualization, Performance modeling, Immersion lithography, Double patterning technology

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Proceedings Article | 7 March 2008 Paper

32nm overlay improvement capabilities

Brad Eichelberger, Kevin Huang, Kelly O'Brien, David Tien, Frank Tsai, Anna Minvielle, Lovejeet Singh, Jeffrey Schefske

Proceedings Volume 6924, 69244C (2008) https://doi.org/10.1117/12.773014

KEYWORDS: Semiconducting wafers, Scanners, Overlay metrology, Metrology, Double patterning technology, Performance modeling, Data modeling, Lithography, Optical lithography, Statistical modeling

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