Mr. Ke Cao Profile

Ke Cao

at Qualcomm Inc

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 21 March 2007 Paper

Wire sizing and spacing for lithographic printability optimization

Ke Cao, Jiang Hu, Mosong Cheng

Proceedings Volume 6521, 652111 (2007) https://doi.org/10.1117/12.708974

KEYWORDS: Lithography, Resolution enhancement technologies, Photomasks, Optical proximity correction, Semiconducting wafers, Silicon, Image segmentation, Very large scale integration, Optimization (mathematics), Diffraction

Read Abstract +

Proceedings Article | 3 May 2004 Paper

Layout modification for library cell Alt-PSM composability

Ke Cao, Jiang Hu, Mosong Cheng

Proceedings Volume 5379, (2004) https://doi.org/10.1117/12.538900

KEYWORDS: Computer aided design, Photomasks, Phase shifts, Phase shifting, Resolution enhancement technologies, Silicon, Lithography, Optical proximity correction, Solids, Optical lithography

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years