Dr. Kazumi Fujima Profile

Dr. Kazumi Fujima

at Univ of Yamanashi

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Author

Publications (4)

Proceedings Article | 20 March 2008 Paper

Advanced laser-produced EUV light source for HVM with conversion efficiency of 5-7% and B-field mitigation of ions

K. Nishihara, A. Sunahara, A. Sasaki, S. Fujioka, Y. Shimada, M. Nunami, H. Tanuma, M. Murakami, T. Aota, K. Fujima, H. Furukawa, T. Nishikawa, F. Koike, R. More, T. Kato, V. Zhakhovskii, K. Gamata, H. Ueda, H. Nishimura, Y. Yuba, K. Nagai, N. Miyanaga, Y. Izawa, K. Mima

Proceedings Volume 6921, 69210Y (2008) https://doi.org/10.1117/12.769086

KEYWORDS: Ions, Tin, Pulsed laser operation, Plasma, Extreme ultraviolet, Carbon dioxide lasers, Sputter deposition, Magnetism, Light sources, Etching

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Proceedings Article | 6 May 2005 Paper

Estimations on high energy ions and neutral particles from LPP EUV light sources

H. Furukawa, T. Kawamura, T. Nishikawa, A. Sasaki, K. Fujima, S. Fujioka, H. Nishimura, K. Nishihara, N. Miyanaga, Y. Izawa, C. Yamanaka

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.597959

KEYWORDS: Particles, Extreme ultraviolet, Light sources, Ions, Xenon, Ionization, Laser ablation, Optical simulations, Laser development, Plasmas

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Proceedings Article | 20 May 2004 Paper

Theoretical simulation of extreme UV radiation source for lithography

Kazumi Fujima, Katsunobu Nishihara, Toru Kawamura, Hiroyuki Furukawa, Takashi Kagawa, Fumihiro Koike, Richard More, Masakatsu Murakami, Takeshi Nishikawa, Akira Sasaki, Atsushi Sunahara, Vasillii Zhakhovskii, Takashi Fujimoto, Hajime Tanuma

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.534989

KEYWORDS: Ions, Extreme ultraviolet, Plasmas, Electrons, Tin, Lithography, Solids, Ultraviolet radiation, Opacity, Xenon

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Proceedings Article | 20 May 2004 Paper

Estimation of emission efficiency for laser-produced EUV plasmas

Toru Kawamura, Atsushi Sunahara, Kouhei Gamada, Kazumi Fujima, Fumihiro Koike, Hiroyuki Furukawa, Takeshi Nishikawa, Akira Sasaki, Takashi Kagawa, Richard More, Takako Kato, Masakatsu Murakami, Vasillii Zhakhovskii, Hajime Tanuma, Takashi Fujimoto, Yoshinori Shimada, Michiteru Yamaura, Kazuhisa Hashimoto, Shigeaki Uchida, Chiyoe Yamanaka, Tomoharu Okuno, Takahiro Hibino, Nobuyoshi Ueda, Ryoji Matsui, Yezheng Tao, Mitsuo Nakai, Keisuke Shigemori, Shinsuke Fujioka, Keiji Nagai, Takayoshi Norimatsu, Hiroaki Nishimura, Katsunobu Nishihara, Noriaki Miyanaga, Yasukazu Izawa

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.535031

KEYWORDS: Extreme ultraviolet, X-rays, Plasmas, Tin, Electrons, Ions, Opacity, Laser development, Solids, Pulsed laser operation

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