Dr. Kazufumi Yachi Profile

Dr. Kazufumi Yachi

at Hitachi High-Tech Corporation.

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Author

Publications (2)

Proceedings Article | 10 April 2024 Poster

Electrical characterization and inspection of contact plugs using laser-assisted SEM

Minami Shoji, Yohei Nakamura, Yasuhiro Shirasaki, Heita Kimizuka, Kazufumi Yachi, Satoshi Takada, Natsuki Tsuno

Proceedings Volume 12955, 129553G (2024) https://doi.org/10.1117/12.3011058

KEYWORDS: Inspection, Scanning electron microscopy, Metrology, Laser irradiation, Electrical properties, Defect detection, Yield improvement, Semiconductors, Modulation, Manufacturing

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Proceedings Article | 10 April 2024 Presentation + Paper

Evaluation of thin-film material properties using laser-assisted SEM

Yasuhiro Shirasaki, Minami Shoji, Yohei Nakamura, Kazufumi Yachi, Satoshi Takada, Natsuki Tsuno

Proceedings Volume 12955, 129551K (2024) https://doi.org/10.1117/12.3009789

KEYWORDS: Scanning electron microscopy, Materials properties, Laser irradiation, Electron beams, Plasma etching, Semiconductors, Etching, Annealing, Interfaces, Plasma

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