We have developed a robust bandpass filter that is suitable for use in mid- and far-infrared cryogenic space telescopes using simple photolithography. The filter consists of Babinet complementary metamaterial mirrors, which are sub-wavelength holes on a silicon wafer with metalized rim and bottom, and non-metalized side wall. The mirrors work as a “Fabry-Perot interference” type bandpass filter and have a spectral resolving power of R~10. The central wavelength is tunable by adjusting the optical distance between the surface and the bottom. It has higher mechanical toughness compared to conventional metal mesh-filters because of the support of the silicon wafer. It also has higher resistance to thermal cycles compared to conventional multi-layer filters because of its simple structure. The central wavelength can be configured only by the sub-wavelength structure without changing the depth of the holes, so that monolithic filters with different central wavelengths at each position can be fabricated.
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