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Kai-Marcel Muckensturm
at Fraunhofer IMS
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Publications (1)
Proceedings Article | 20 May 2016 Paper
Measurement results of a 12 µm pixel size microbolometer array based on a novel thermally isolating structure integrated on a 17 µm ROIC
K.-M. Muckensturm, D. Weiler, F. Hochschulz, C. Busch, T. Geruschke, S. Wall, J. Heß, D. Würfel, R. Lerch, H. Vogt
Proceedings Volume 9819, 98191N (2016) https://doi.org/10.1117/12.2223608
KEYWORDS: Microbolometers, Electro optics, Readout integrated circuits, Absorption, Reflectors, Resistance, Semiconducting wafers, Infrared radiation, Nanolithography, Optical resonators
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