Mr. Jooil Jang Profile

Jooil Jang

at AUROS Technology, Inc.

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Publications (1)

Proceedings Article | 10 April 2024 Poster + Paper

Modeling of polarization state change induced by off-axis reflective objectives for beam focusing in spectroscopic ellipsometry

Tae Dong Kang, Daewon Kwon, Inhee Joh, Myeongrok Oh, Mita Park, Hwanseong Moon, Seonmi Shin, Jooil Jang, Jinwon Park, Sangjun Park, Junje Seong, Ghilsoo Lee, Sungtae Kim

Proceedings Volume 12955, 129553W (2024) https://doi.org/10.1117/12.3025291

KEYWORDS: Reflection, Objectives, Polarization, Semiconducting wafers, Optical systems, Calibration, Film thickness, Modeling, Ellipsometry

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