Mr. Jinlong Zhu Profile

Jinlong Zhu

Ph.D Student at Huazhong Univ of Science and Technology

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 19 March 2015 Paper

Data refinement for robust solution to the inverse problem in optical scatterometry

Jinlong Zhu, Hao Jiang, Chuanwei Zhang, Xiuguo Chen, Shiyuan Liu

Proceedings Volume 9424, 94240Y (2015) https://doi.org/10.1117/12.2086058

KEYWORDS: Inverse optics, Scatterometry, Inverse problems, Optics manufacturing, Transmission electron microscopy, Error analysis, Integrated optics, Nanostructures, Process control, Chemical elements

Read Abstract +

SPIE Journal Paper | 17 January 2013 Open Access

Identification and reconstruction of diffraction structures in optical scatterometry using support vector machine method

Chuanwei Zhang, Shiyuan Liu, Jinlong Zhu, Xiuguo Chen, Zhengqiong Dong

JM3, Vol. 12, Issue 01, 013004, (January 2013) https://doi.org/10.1117/12.10.1117/1.JMM.12.1.013004

KEYWORDS: Diffraction, Scatterometry, Error analysis, Computer simulations, Inverse optics, Geometrical optics, Algorithm development, Diffraction gratings, Critical dimension metrology, Optical testing

Read Abstract +

DOWNLOAD PAPER

Proceedings Article | 3 April 2012 Paper

Classification and recognition of diffraction structures using support vector machine in optical scatterometry

Jinlong Zhu, Shiyuan Liu, Chuanwei Zhang, Xiuguo Chen, Zhengqiong Dong

Proceedings Volume 8324, 83242S (2012) https://doi.org/10.1117/12.916259

KEYWORDS: Diffraction, Library classification systems, Scatterometry, Error analysis, Inverse optics, Metrology, Photoresist materials, Image classification, Scanning electron microscopy, Diffraction gratings

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years