Dr. Jingwei Yao Profile

Dr. Jingwei Yao

at Chinese Academy of Sciences

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Publications (2)

Proceedings Article | 25 October 2016 Paper

High precision locating control system based on VCM for Talbot lithography

Jingwei Yao, Lixin Zhao, Qian Deng, Song Hu

Proceedings Volume 9685, 96850L (2016) https://doi.org/10.1117/12.2243616

KEYWORDS: Control systems, Lithography, Digital signal processing, Control systems design, Signal processing, Feedback control, Device simulation, Mathematical modeling, Electromagnetism, Servomechanisms

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Proceedings Article | 25 October 2016 Paper

Thickness measurement of transparent film by white-light interferometry

Qinyuan Deng, Yi Zhou, Junbo Liu, Jingwei Yao, Song Hu

Proceedings Volume 9685, 968506 (2016) https://doi.org/10.1117/12.2243601

KEYWORDS: Interferometry, Reflectometry, Thin films, Reflection, Silicon films, Silicon, Optics manufacturing, Beam splitters, Reflectivity, Fourier transforms

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