Prof. Jingfeng Kang Profile

Prof. Jingfeng Kang

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 10 December 2024 Paper

Hongye Gao, Linqiang Ye, Jingfeng Kang, Lingyi Guo, Gaolin Mu, Jincheng Pei

Proceedings Volume 13423, 134231H (2024) https://doi.org/10.1117/12.3054446

KEYWORDS: Design, Overlay metrology, Optical parametric oscillators, Metrology, Manufacturing, Process control

Proceedings Article | 10 December 2024 Paper

Hongye Gao, Linqiang Ye, Jingfeng Kang, Wei Li, Aijiao Zhu, Xuanyu Ta, Jincheng Pei, Kevin Huang

Proceedings Volume 13423, 134230V (2024) https://doi.org/10.1117/12.3052961

KEYWORDS: Metrology, Overlay metrology, Semiconducting wafers, Scanners, Reticles, High volume manufacturing, Process control, Data modeling

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