Dr. Jing Xu Profile

Dr. Jing Xu

at SIMIT

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Publications (2)

Proceedings Article | 4 January 2008 Paper

Optical fiber accelerometer based on MEMS torsional micromirror

Fanlin Zeng, Shaolong Zhong, Jing Xu, Yaming Wu

Proceedings Volume 6836, 68360Q (2008) https://doi.org/10.1117/12.768488

KEYWORDS: Micromirrors, Optical fibers, Signal detection, Collimators, Microelectromechanical systems, Silicon, Sensors, Neodymium, Deep reactive ion etching, Semiconducting wafers

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Proceedings Article | 4 January 2008 Paper

Experimental study on roughness and flatness of micromirror fabricated by different anisotropic silicon etching processes

Jing Xu, Zhanxi Huang, Xiaoxin Xu, Yaming Wu

Proceedings Volume 6836, 683605 (2008) https://doi.org/10.1117/12.768487

KEYWORDS: Etching, Silicon, Semiconducting wafers, Surface roughness, Micromirrors, Anisotropic etching, Dry etching, Deep reactive ion etching, Ions, Wet etching

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