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Jia-Guei Jou
Manager at Taiwan Semiconductor Manufacturing Co Ltd
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Publications (1)
Proceedings Article | 8 November 2012 Paper
Generating well-behaved OASIS files for mask data processing
D. Hung, J. Canepa, K. Kuo, J. Jou
Proceedings Volume 8522, 85220V (2012) https://doi.org/10.1117/12.964293
KEYWORDS: Photomasks, Data processing, Data conversion, Semiconductor manufacturing, Manufacturing, Data storage, Associative arrays, Product engineering, Data modeling, Lithography
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