Mr. Jeremy A. Walraven Profile

Jeremy A. Walraven

Senior Member Technical Staff at Sandia National Labs

SPIE Involvement:

Author

Proceedings Article | 5 February 2010 Paper

Stability experiments on MEMS aluminum nitride RF resonators

Danelle Tanner, Roy Olsson, Ted Parson, Shannon Crouch, Jeremy Walraven, James Ohlhausen

Proceedings Volume 7592, 759209 (2010) https://doi.org/10.1117/12.846551

KEYWORDS: Resonators, Semiconducting wafers, Aluminum nitride, Silicon, Microelectromechanical systems, Electrodes, Contamination, Aluminum, Network security, Sensors

Read Abstract +

Proceedings Article | 22 January 2005 Paper

Damage of MEMS thermal actuators heated by laser irradiation

Leslie Phinney, Kelly Klody, John Sackos, Jeremy Walraven

Proceedings Volume 5716, (2005) https://doi.org/10.1117/12.594408

KEYWORDS: Actuators, Oxides, Microelectromechanical systems, Laser induced damage, Thermography, Optical fabrication, Laser irradiation, Silicon, Failure analysis, Target detection

Read Abstract +

Proceedings Article | 22 January 2005 Paper

Backside preparation and failure analysis for packaged microelectromechanical systems (MEMS)

Jeremy Walraven, Edward Cole, David Barr, Richard Anderson, Alice Kilgo, John Maciel, Richard Morrison, Nafiz Karabudak

Proceedings Volume 5716, (2005) https://doi.org/10.1117/12.600794

KEYWORDS: Failure analysis, Microelectromechanical systems, Inspection, Silicon, Polishing, Epoxies, Electrical breakdown, Ceramics, Switches, Packaging

Read Abstract +

Proceedings Article | 23 December 2003 Paper

Electrothermal actuator reliability studies

Richard Plass, Michael Baker, Jeremy Walraven

Proceedings Volume 5343, (2003) https://doi.org/10.1117/12.530936

KEYWORDS: Actuators, Thermal modeling, Reliability, Scanning electron microscopy, Silicon, Resistance, Photomicroscopy, Microelectromechanical systems, Modulation, Data modeling

Read Abstract +

Proceedings Article | 16 January 2003 Paper

Failure analysis of a multi-degree-of-freedom spatial microstage

Jeremy Walraven, Bernhard Jokiel

Proceedings Volume 4980, (2003) https://doi.org/10.1117/12.478207

KEYWORDS: Failure analysis, Actuators, Oxides, Tolerancing, Computer aided design, Microfabrication, Reliability, Silicon, Microelectromechanical systems, Optical alignment

Read Abstract +

Proceedings Article | 16 January 2003 Paper

Anodic oxidation-induced delamination of the SUMMiT poly 0 to silicon nitride interface

Richard Plass, Jeremy Walraven, Danelle Tanner, Frederick Sexton

Proceedings Volume 4980, (2003) https://doi.org/10.1117/12.476366

KEYWORDS: Electrodes, Silicon, Interfaces, Oxides, Microelectromechanical systems, Humidity, Scanning electron microscopy, Photomicroscopy, Oxygen, Oxidation

Read Abstract +

Proceedings Article | 2 October 2001 Paper

Characterization of an inchworm actuator fabricated by polysilicon surface micromachining

Maarten de Boer, David Luck, Jeremy Walraven, James Redmond

Proceedings Volume 4558, (2001) https://doi.org/10.1117/12.443009

KEYWORDS: Actuators, Coating, Electrodes, Silicon, Oxides, Moire patterns, Surface micromachining, Microelectromechanical systems, Atomic force microscopy, Calibration

Read Abstract +

Proceedings Article | 2 October 2001 Paper

Failure analysis of radio frequency (rf) micro-electro-mechanical systems (MEMS)

Jeremy Walraven, Edward Cole, Lynn Sloan, Susan Hietala, Chris Tigges, Christopher Dyck

Proceedings Volume 4558, (2001) https://doi.org/10.1117/12.442999

KEYWORDS: Switches, Microelectromechanical systems, Metals, Failure analysis, Aluminum, Scanning electron microscopy, Gold, Gallium arsenide, Etching, Electrodes

Read Abstract +

Proceedings Article | 10 August 2000 Paper

Electrostatic discharge/electrical overstress susceptibility in MEMS: a new failure mode

Jeremy Walraven, Jerry Soden, Danelle Tanner, Paiboon Tangyunyong, Edward Cole, Richard Anderson, Lloyd Irwin

Proceedings Volume 4180, (2000) https://doi.org/10.1117/12.395703

KEYWORDS: Microelectromechanical systems, Actuators, Electrical breakdown, Scanning electron microscopy, Failure analysis, Amplifiers, Instrument modeling, Atomic force microscopy, Manufacturing, Thermal modeling

Read Abstract +

Proceedings Article | 10 August 2000 Paper

Failure analysis of tungsten-coated polysilicon micromachined microengines

Jeremy Walraven, Seethambal Mani, James Fleming, Thomas Headley, Paul Kotula, Alejandro Pimentel, Michael Rye, Danelle Tanner, Norman Smith

Proceedings Volume 4180, (2000) https://doi.org/10.1117/12.395708

KEYWORDS: Tungsten, Microelectromechanical systems, Scanning electron microscopy, Transmission electron microscopy, Failure analysis, Electrical breakdown, Silicon, Humidity, Atomic force microscopy, Surface roughness

Read Abstract +

Proceedings Article | 18 August 1999 Paper

Failure analysis of worn surface-micromachined microengines

Jeremy Walraven, Thomas Headley, Ann Campbell, Danelle Tanner

Proceedings Volume 3880, (1999) https://doi.org/10.1117/12.359369

KEYWORDS: Humidity, Microelectromechanical systems, Failure analysis, Scanning electron microscopy, Transmission electron microscopy, Silicon, Diffraction, Nitrogen, Chemical analysis, Spectroscopy

Read Abstract +

Showing 5 of 11 publications

Conference Committee Involvement (4)

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V

25 January 2006 | San Jose, California, United States

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV

25 January 2005 | San Jose, California, United States

Reliability, Testing, and Characterization of MEMS/MOEMS III

26 January 2004 | San Jose, California, United States

Reliability, Testing, and Characterization of MEMS/MOEMS II

27 January 2003 | San Jose, CA, United States

Keywords/Phrases

Search In:

Publication Years