An alternative technique for blazing sinusoidal-profile gratings is discussed. Whereas conventional blazing techniques use an energetic ion beam to mill through a sinusoidal photoresist profile into a substrate, this technque creates the blazed profile in the photoresist itself, without milling into a substrate. Advantages to this technique are discussed, and grating efficiency curves and groove profiles are shown, before and after ion milling. Simulation results that predict the evolution of the groove profile under ion bombardment are also discussed.
We show measurements of interorder scattered light from various grating surfaces. The measurements compare holographic and ruled gratings for in-plane and out-of-plane conditions at 254 nm and 633 nm.
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