Prof. Jean-François Robillard
at IEMN
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 4 March 2019 Paper
Proceedings Volume 10906, 109060K (2019) https://doi.org/10.1117/12.2507652
KEYWORDS: Semiconductor materials, Silicon, Laser ablation, Etching, Switches, Micromachining, Laser processing, Profilometers, Femtosecond laser micromachining

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