A multilayer hyperbolic metamaterial (HMM), fabricated from alternating thin films of metal and dielectric, displays a hyperbolic, anisotropic dispersion relation due to the coupling of excited surface plasmons. The design, fabrication, and characterization of an HMM based on TiO2 / Cu alternating layers with a metal-to-dielectric fill factor of 67% is presented. The layers were deposited onto glass and silicon substrates using physical vapor deposition (PVD) with an electron beam evaporator and then characterized using ellipsometry. According to the effective medium theory, this design shows an epsilon-near-zero (ENZ) line near the Helium-Neon wavelength of 633 nm. Our experimental measurements are in good agreement with the theoretical predictions.
We present the design, fabrication, and characterization of a polarization-selective infrared bandpass filter based on a two-layer subwavelength metallic grating for use in polarimetric imaging. Gold nanowires were deposited via physical vapor deposition (PVD) onto a silicon surface relief grating that was patterned using electron beam lithography (EBL) and fabricated using standard silicon processing techniques. Optical characterization with a broad-spectrum tungsten halogen light source and a grating spectrometer showed normalized peak TM transmission of 53% with a full-width at half-maximum (FWHM) of 122 nm, which was consistent with rigorous coupled-wave analysis (RCWA) simulations. Simulation results suggested that device operation relied on suppression of the TM transmission caused by surface plasmon polariton (SPP) excitation at the gold-silicon interface and an increase in TM transmission caused by a Fabry-Perot (FP) resonance in the cavity between the gratings. TE rejection occurred at the initial air/gold interface. We also present simulation results of an improved design based on a two-dielectric grating where two different SPP resonances allowed us to improve the shape of the passband by suppressing the side lobes. This newer design resulted in improved side-band performance and increased peak TM transmission.
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