The proposed micro-spectrometer consists of multi-slit grating and bolometric IR detector array. The grating is used for
dispersion of an incident optical radiation into different wavelength components. The grating pattern is made by metal
RIE of aluminum deposited on dielectric membrane, which is fabricated over silicon wafer. The IR detector part adopts a
resistive bolometer that changes its resistance when a temperature change occurs. Due to the temperature rise by an
incident IR ray, the presence of IR can be detected by knowing the resistance change on the bolometer. For the material
of resistive bolometer, vanadium oxide is utilized. Vanadium oxide is adopted for resistive bolometer in this work
because of its high TCR.
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