Iulian Pana
Researcher at INOE 2000
SPIE Involvement:
Author
Publications (1)

SPIE Journal Paper | 28 August 2024
Iulian Pana, Anca Parau, Mihaela Dinu, Adrian Kiss, Lydia Constantin, Alina Dragomir (Vladescu), Catalin Vitelaru
JPE, Vol. 14, Issue 03, 034001, (August 2024) https://doi.org/10.1117/12.10.1117/1.JPE.14.034001
KEYWORDS: Multilayers, Optical properties, Silicon nitride, Copper, Reflectivity, Quartz, Heat treatments, Temperature metrology, Annealing, Silicon

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