Ms. Irina Harder Profile

Irina Harder

at Friedrich-Alexander Univ Erlangen-Nürnberg

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Publications (3)

Proceedings Article | 24 August 2009 Paper

Dynamic array spot shaping for laser micro machining

A. Bich, K. Weible, R. Voelkel, M. Zimmermann, I. Harder, N. Lindlein, J. Masson, R. Bitterli, W. Noell, T. Scharf

Proceedings Volume 7430, 74300I (2009) https://doi.org/10.1117/12.828435

KEYWORDS: Microlens array, Beam homogenizers, Optical components, Telescopes, Homogenization, Beam shaping, Diffractive optical elements, Excimer lasers, Diffusers, Microlens

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Proceedings Article | 25 April 2008 Paper

Wave-optical simulation of a grating lateral shearing interferometer with a periodic incoherent light source

Norbert Lindlein, Sarina Wunderlich, Irina Harder, Klaus Mantel, Maik Lano, Johannes Schwider

Proceedings Volume 6994, 699407 (2008) https://doi.org/10.1117/12.783245

KEYWORDS: Light sources, Diffraction, Diffraction gratings, Wave propagation, Shearing interferometers, Sensors, Optical components, Free space, Light wave propagation, Roentgenium

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Proceedings Article | 1 September 2004 Paper

Homogenization and beam shaping with microlens arrays

Irina Harder, Maik Lano, Norbert Lindlein, Johannes Schwider

Proceedings Volume 5456, (2004) https://doi.org/10.1117/12.549015

KEYWORDS: Light sources, Microlens array, Sensors, Light emitting diodes, Microlens, Homogenization, Beam shaping, Lithography, Diffraction, Spatial coherence

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