Mr. Ichiro Fujimura Profile

Ichiro Fujimura

at Keio Univ

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 16 February 2012 Paper

High-aspect ratio of near-field nano-lens for deep nano-crater patterning

Ichiro Fujimura, Mitsuhiro Terakawa

Proceedings Volume 8243, 82431F (2012) https://doi.org/10.1117/12.907661

KEYWORDS: Optical spheres, Refractive index, Near field, Near field optics, Dielectrics, Silicon, Optical lithography, Nanolithography, Dielectric polarization, Femtosecond phenomena

Read Abstract +

Enhanced optical field close to nano-dielectric spheres excited by a femtosecond laser enables high-throughput nano-crater patterning. With spheres larger than the incident wavelength, the focused far field is well known in optics to be governed by micro-lens, while the enhanced near field with spheres smaller than or equivalent to the incident wavelength is dominated by the resonant Mie-scattering. The crater fabricated by the near-field nano-lens is much shallower than by the micro-lens. Revealing the largest crater depth relative to the diameter will advance the smart applications for nanotribology, nano-sensors and nano-biomedicine. Here, we study the aspect ratio (the depth profile in the substrate relative to the diameter of the intensity profile on the surface of the near-field intensity distribution in the substrate). It is because the fabricated nano-crater depth is empirically determined by the near-field intensity distribution. A maximal vertical intensity profile is found as a function of refractive index and sphere diameter. The dielectric spheres ranging from 400 to 1000 nm diameter on the Si substrate are studied at 800 nm wavelength. Using a sphere with the smaller refractive indices, the larger aspect ratio is achieved. However, a maximal optical intensity is sacrificed for the high aspect ratio. Largest aspect ratios for the near-field nano-patterning range from 3.0 through 4.2 using available spheres with refractive indices of from 1.4 to 3.0. We also consider the difference of the enhanced optical intensity distribution between the systems consists of a single isolated dielectric sphere on a silicon substrate and that consisting of mono-layered hexagonal dielectric sphere array on a silicon substrate.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years