Mr. Ian M. Dudley Profile

Ian M. Dudley

Engineering Manager at Infinera Corp

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Publications (3)

Proceedings Article | 24 May 2004 Paper

Application of scatterometry to shallow trench isolation monitoring

Ian Dudley, Anjan Somadder

Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.535437

KEYWORDS: Semiconducting wafers, Critical dimension metrology, Silicon, Scatterometry, Cadmium sulfide, Nondestructive evaluation, Metrology, Etching, Scanning electron microscopy, Light sources

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Proceedings Article | 16 July 2002 Paper

Gate line edge roughness effects in 50-nm bulk MOSFET devices

Shiying Xiong, Jeffrey Bokor, Qi Xiang, Philip Fisher, Ian Dudley, Paula Rao

Proceedings Volume 4689, (2002) https://doi.org/10.1117/12.473517

KEYWORDS: Line edge roughness, Critical dimension metrology, Diffusion, 3D modeling, Semiconducting wafers, Field effect transistors, Doping, Scanning electron microscopy, Spatial frequencies, Device simulation

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Proceedings Article | 3 September 1999 Paper

Application of CD-SEM edge-width measurement to contact-hole process monitoring and development

Jean Yang, Ian Dudley

Proceedings Volume 3882, (1999) https://doi.org/10.1117/12.361297

KEYWORDS: Etching, Scanning electron microscopy, Semiconducting wafers, Detection and tracking algorithms, Photoresist processing, Edge detection, Critical dimension metrology, Optimization (mathematics), Image resolution, Image processing

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