Ms. Hwei Lin Chuang Profile

Hwei Lin Chuang

at United Microelectronics Corp

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 15 February 2006 Paper

In-line implant and RTP process monitoring using the carrier illumination technique for 65 nm and beyond

C. I. Li, H. Chuang, P. Chen, C. H. Liu, C. C. Chien, K. T. Huang, S. F. Tzou

Proceedings Volume 6104, 61040T (2006) https://doi.org/10.1117/12.646050

KEYWORDS: Semiconducting wafers, Capacitance, Signal detection, Semiconductor lasers, Annealing, Metrology, Nondestructive evaluation, Ions, Laser applications, Laser marking

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years