Dr. Mary Wu Profile

Dr. Mary Wu

at Thermo Fisher Scientific Inc

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Publications (1)

Proceedings Article | 10 April 2024 Poster + Paper

Advancement in DualBeam (FIB/SEM) technologies for automatic defect root cause analysis

Zhi Hui Zhu, Arun Sundar, Sarah Gollub, Mahmoud Amin, John McPhillips, Pete Carleson, Mary Wu

Proceedings Volume 12955, 129553Q (2024) https://doi.org/10.1117/12.3014195

KEYWORDS: Semiconducting wafers, Scanning electron microscopy, Transmission electron microscopy, Statistical analysis, Defect inspection, Automation, Wafer inspection, Microelectromechanical systems, Logic, 3D image processing

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