Dr. Hui Ju Profile

Dr. Hui Ju

Researcher at Nagoya Univ

SPIE Involvement:

Author

Publications (5)

Proceedings Article | 4 January 2008 Paper

The surface treatment of silicon wafer by microwave down-stream plasma etching

Hui Ju, Wenkui Wang

Proceedings Volume 6831, 683114 (2008) https://doi.org/10.1117/12.755881

KEYWORDS: Silicon, Etching, Oxygen, Atomic force microscopy, Microwave radiation, Fluorine, Chemical species, Plasma, Scanning electron microscopy, Plasma etching

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Proceedings Article | 7 March 2007 Paper

The silicon mold fabrication of a kind of micro-optical resonator and coupler

Hui Ju, Takayuki Ohta, Satoru Takao, Masafumi Ito, Minoru Sasaki, Kazuhiro Hane, Masaru Hori

Proceedings Volume 6462, 64620I (2007) https://doi.org/10.1117/12.697130

KEYWORDS: Etching, Semiconducting wafers, Silicon, Crystals, Resonators, Anisotropic etching, Polymethylmethacrylate, Micro optical resonators, Reflection, Optical lithography

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Proceedings Article | 6 December 2005 Paper

Small quartz mirrors with high reflectance and design of a kind of micro Fabry Perot interferometer

Hui Ju, Kenji Sato, Takayuki Ohta, Keiichi Nakamula, Takeaki Hattori, Kunihiko Souma, Daigo Ichinose, Takasi Kotani, Masafumi Ito

Proceedings Volume 6050, 60500Z (2005) https://doi.org/10.1117/12.645453

KEYWORDS: Mirrors, Reflectivity, Quartz, Interferometers, Sputter deposition, Dielectrics, Ferroelectric materials, Scanning electron microscopy, Fabry–Perot interferometers, Fabry–Perot interferometry

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SPIE Journal Paper | 1 January 2005

Blazed silicon gratings fabricated by deflecting crystal orientation (111) silicon wafer

Hui Ju, Ping Zhang, Jingqiu Liang, Shurong Wang, YiHui Wu

JM3, Vol. 4, Issue 01, 019701, (January 2005) https://doi.org/10.1117/12.10.1117/1.1857533

KEYWORDS: Silicon, Semiconducting wafers, Diffraction gratings, Crystals, Scanning electron microscopy, Wet etching, Atomic force microscopy, Wafer-level optics, Optical design, Photomasks

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Proceedings Article | 28 September 2001 Paper

Lamb waves generated by laser

Yihui Wu, Hongguang Jia, Hui Ju

Proceedings Volume 4557, (2001) https://doi.org/10.1117/12.442967

KEYWORDS: Modulation, Silicon, Reflectivity, Thermography, Diffusion, Argon ion lasers, Semiconductor lasers, Acoustics, Sensors, Liquids

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