A method for designing a class of phase-only super-resolving filters with continuous-phase that can be described by a sum of Zernike polynomials with weight coefficients is presented. With the use of the global search algorithm, differential evolution method, and the local search algorithm, the conjugate gradient method, three filters were designed as examples. The main-lobe size of the point spread function of the three filters can be reduced, keeping allowable central intensity and sidelobe intensity for some typical applications. This type of filter has the advantage of lower scatter compared with other phase-only filters composed of discontinuous phase. In particular, such filters can be implemented dynamically by a phase-controlling device.
As the primary facility for the manufacturing of integrated circuit(IC), and MEMS devices [1], the lithographic
equipment’s improvement is restricted by the projection objective which can decide the capacity of the image
transmission of the facility and make the facility be capable of reaching the higher precision or beyond. On the basis of
the function, increasing the numeric aperture is coupled with the raising of resolution of the projection objective. In this
paper, a design of a projection objective with high numeric aperture and large view field for I-line lithography is
proposed. Owning a dual-telecentric structure this optical system owns an angular magnification of -1.25, an effective
image field of 90×90mm and an image numeric aperture of 0.2. Two aspheric surfaces are adopted in this projection
objective to enhance the quality of imaging that will insure the field curvature lower than a half of the DOF, restrict the
distortion lower than±σ/5 and make the MTF approximate the diffraction limits.
High performance infrared polarizer with broad band is required for various infrared applications. The conventional infrared polarizer, based on the birefringence effect of natural crystal, is cost-consuming in fabrication and can hardly be integrated into micro-optical systems due to its large bulk. In this paper, an infrared polarizer is proposed in the spectrum from 3 to 19 μm based on sub-wavelength metal wire grid. The dependence of the performance on some key parameters, including metal materials, geometrical parameters, has been deeply investigated by using the Finite-Difference Time-Domain (FDTD) method. The results show that Au wire-grids have a higher transmittance for the Transverse Magnetic(TM) mode light than that of other metal materials, and both the grid period and the grid thickness have important impact on the performance. Based on these observations, a polarizer has been designed by choosing the optimal value of related parameters. Numerical simulation suggests that the designed infrared wire grid polarizer have advantages of broad band, high TM polarization transmission efficiencies and high extinction ratios. The transmission efficiencies of TM polarization are larger than 59.3%, and the extinction ratios range from 28.6 to 44.6 dB in that range of the spectrum.
In this paper, a simple Tris (8-hydroxyquinolinato) aluminium (Alq3) /Ag particles/glass substrate trilayer structure
was fabricated to investigate the metal-enhanced photoluminescence phenomena. The polystyrene sphere (PS)
self-assembly technology was used to constitute nanoscale metallic particle array on the glass substrate. Based on
the localized surface plasmons (LSPs) excited by these metallic particles, fluorescence enhancement of the organic
light-emitting material has been actualized. The finite-difference time-domain (FDTD) simulations have been
performed to analyze the experiment results. Subsequently, an optimized design which depended on the extinction
cross-section of the metallic particles was proposed to improve the enhancement factor.
The secondary optical lens of the light-emitting diode (LED) constructed with freeform surface plays more and more
important role in common illumination. The reflective loss at the freeform interfaces is discussed in this work. To restrict
the reflective loss of the rays with the large incident angle, the freeform surface design rule is proposed. In this rule, the
maximum deflexion angle of the refractive surface is 25° for a single freeform interface when choose PMMA to be the
lens material, and the total reflection surface is introduced to control the rays which cannot be dealt by the refractive
surfaces. The lens examples based on this rule are constructed by multi-segment freeform surfaces and the results show
that the reflective loss is controlled less than 10%.
The correction of the human eye's higher-order wave aberrations by a phase plate has been studied. The phase plate was made by using a single-mask-moving technique. The imaging quality has been analyzed in terms of several metrics. The results show that the fabrication error is 0.05 µm, which is close to /14 at the medium value of the wavelength of white light, and the performance of the eye can be improved by the phase plate, indicating that the single-mask-moving technique has potential applications in clinically correcting ocular aberrations.
This paper focuses on the study of sensitivities of microcantilever chemical sensors based on SOI POLYMUMPS
process. Through changing the geometry of beams and analyzing resonance frequency shift in a dynamic mode by using
FEA (finite element analysis) method, the most sensitive structure, which is a triangle, is selected out from various kinds
of beam designs. The relation between the sensitivity and the parameters such as length L, width W and thickness t is
obtained by dynamic analyzing with the commercial software Intellisuite. This research provides the primary instruction
for developing high sensitive multi-array biochips aiming at analyzing multiple parameters in parallel.
A laboratory turbulence simulation based on irregular micro-optical structures has been studied. The phase distributions are derived from Kolmogorov spectra with different Fried parameters r0 by using the fast Fourier transform technique. A mask-shifting method has been invented for generating the designed irregular phase on a quartz substrate. The fabricated element is rotated by a motor to construct a turbulence generator. The dynamic phase produced by the generator is measured in real time with Shack-Hartmann sensor. The resulting power spectrum and the Fried parameter agree with the expected ones. Some issues associated with the simulation of turbulence are discussed.
Metallic nano-slits film is proposed to implement beam manipulation, such as focusing, deflecting and imaging etc. The principle of this novel nano metric device, termed as plasmonic nano lens, is based on the different phase retardation of light when transmitted through a metallic film with arrayed nano-slits, which have constant depth but variant widths. The slits transport electro-magnetic energy in the form of surface plasmon polaritons (SPPs) in nanometric waveguides and provide desired phase retardations of beam manipulating with variant phase propagation constant. Numerical simulations of illustrative examples are performed through finite-difference time-domain (FDTD) method and show its validity as a lens and other potential photonic devices. In addition, extraordinary optical transmission of SPPs through sub-wavelength metallic slits is observed in the simulation and implies higher efficiency than usual binary devices featured with transparent and opaque regions.
In this paper, we discussed the beam focusing of light emerged from a subwavlength metallic slit surrounded by a set of grooves with constant space and width but variant depth at the exit side surface. Based on the numerical model presented by L. Martin-Moreno, F. J. Garcia-Vidal etc. (published in PRL 167401), we attempted to optimize grooves depth to obtain general beam manipulation, such as beam focusing. This attempt did not prove successful for many cases with variant focal length in our optimization practice, although some specific results display agreeable beam focusing with elongated focal depth. Further numerical computation shows that the excited electromagnetic field intensity around groove openings has a strong dependence on the groove depth, but the phase only vary with a maximum change value of π by tuning the groove depth. This property restricts greatly the modulation of electromagnetic field by just changing each groove depth. More geometrical parameters, including groove space and width, are recommended for optimization in the design of nano metallic groove and slit structures for specific beam manipulation.
In this paper, we investigated the electric field profiles and phase distribution at the metal interfaces of the structure, and then analyzed their dependence on the groove depth and distance between slit and grooves though finite-difference time-domain (FDTD) simulation. Calculated results show that variant groove depth generates phase difference periodically, which indicates the existence of standing wave in the groove. The results also show that the phase of the emission at each groove is proportional to the distance travelled by the surface wave in one period. Based on these facts, a simple process of the transmission model is illuminated.
A wave aberration compensation method for optical system and human eyes has been studied. The wave distortion of the human eye can be measured using a Shack-Hartmann sensor and described in an eight-order Zernike polynomial. By picking up the higher order’s terms of the wave aberration from the measured polynomial, characteristics of the higher order wave aberration were analyzed and concluded. The conjugate phase plates were designed based on the distribution of the single and the overall wave aberration of the eye. The thermal-filtered halftone mask technique is developed to manufacture such an abnormity micro-optical structure. The compensators for the single or the overall wave aberration were fabricated respectively. The relief profiles were evaluated using both three-dimensional profiler and interferometer. A primary experiment for compensating the higher-order wave aberration of an artificial eye was demonstrated.
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