Dr. Hiroshi Okazaki Profile

Dr. Hiroshi Okazaki

Principal Investigator at DuPont Electronic Polymers

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Publications (2)

Proceedings Article | 16 April 2011 Paper

Designing materials for advanced microelectronic patterning applications using controlled polymerization RAFT technology

Michael Sheehan, William Farnham, Charles Chambers, Hoang Tran, Hiroshi Okazaki, Yefim Brun, Matthew Romberger, James Sounik

Proceedings Volume 7972, 79720T (2011) https://doi.org/10.1117/12.882960

KEYWORDS: Polymers, Polymerization, Photoresist materials, Optical lithography, Directed self assembly, Photomasks, Lithography, Photoresist developing, Line width roughness, Microelectronics

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Proceedings Article | 26 March 2008 Paper

RAFT technology for the production of advanced photoresist polymers

Michael Sheehan, William Farnham, Hiroshi Okazaki, James Sounik, George Clark

Proceedings Volume 6923, 69232E (2008) https://doi.org/10.1117/12.772115

KEYWORDS: Polymers, Photoresist materials, Photomasks, Polymerization, Sodium, Line width roughness, Solids, Semiconducting wafers, Optical lithography, Photoresist developing

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