Dr. Hiroshi Kawata Profile

Dr. Hiroshi Kawata

Honorary Professor at High Energy Accelerator Research Organization KEK

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Author

Publications (8)

Proceedings Article | 26 August 2024 Paper

Research and development of the EUV-FEL light source for lithography

Norio Nakamura, Ryukou Kato, Hiroshi Sakai, Kimichika Tsuchiya, Yoshinori Tanimoto, Yosuke Honda, Miho Shimada, Masahiro Yamamoto, Takanori Tanikawa, Olga Tanaka, Takashi Obina, Shinichiro Michizono, Hiroshi Kawata

Proceedings Volume 13177, 131770L (2024) https://doi.org/10.1117/12.3033966

KEYWORDS: Free electron lasers, Light sources, Lithography, Extreme ultraviolet, Extreme ultraviolet lithography, Power consumption, Polarization, Polarization control, Scanners, Tin

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SPIE Journal Paper | 25 June 2022 Open Access

High power light source for future extreme ultraviolet lithography based on energy-recovery linac free-electron laser

Hiroshi Kawata, Norio Nakamura, Hiroshi Sakai, Ryukou Kato, Ryoichi Hajima

JM3, Vol. 21, Issue 02, 021210, (June 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.2.021210

KEYWORDS: Free electron lasers, Light sources, Extreme ultraviolet lithography, Extreme ultraviolet, Electron beams, Mirrors, Scanners, Tin, Magnetism, Niobium

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Proceedings Article | 13 June 2022 Poster + Presentation

Construction and commissioning of cERL IR-FEL for realizing the EUV-FEL for future lithography

Norio Nakamura, Ryukou Kato, Hiroshi Sakai, Kimichika Tsuchiya, Yasunori Tanimoto, Yosuke Honda, Tsukasa Miyajima, Miho Shimada, Takashi Obina, Hiroshi Kawata

Proceedings Volume PC12051, PC120510S (2022) https://doi.org/10.1117/12.2613617

KEYWORDS: Lithography, Free electron lasers, Extreme ultraviolet, Stochastic processes, Physics, Optical resonators, Machine learning, Light sources, Laser development, Infrared radiation

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Proceedings Article | 30 September 2021 Presentation

Demonstration of proof of concept of the EUV-FEL for future lithography

Norio Nakamura, Ryokou Kato, Hiroshi Sakai, Kimichika Tsuchiya, Yasunori Tanimoto, Yosuke Honda, Tsukasa Miyajima, Miho Shimada, Takashi Obina, Hiroshi Kawata

Proceedings Volume 11854, 118540M (2021) https://doi.org/10.1117/12.2600782

KEYWORDS: Free electron lasers, Lithography, Light sources, Extreme ultraviolet, Optical simulations, Laser development, Extreme ultraviolet lithography, Continuous wave operation, Stochastic processes, Scanners

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Proceedings Article | 20 September 2020 Presentation

Achievement of an important milestone to realize the EUV-FEL high power light source for future lithograph

Ryukou Kato, Hiroshi Sakai, Kimichika Tsuchiya, Yasunori Tanimoto, Yosuke Honda, Tsukasa Miyajima, Miho Shimada, Norio Nakamura, Hiroshi Kawata

Proceedings Volume 11517, 115170R (2020) https://doi.org/10.1117/12.2573121

KEYWORDS: Light sources, Free electron lasers, Extreme ultraviolet lithography, Mid-IR, Photomask technology, Extreme ultraviolet, Stochastic processes, Electron beams, Mirrors, Magnetism

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Proceedings Article | 12 October 2018 Presentation

Upgrade plan of cERL for the POC as a first stage of the development on EUV-FEL high power light source (Conference Presentation)

Hiroshi Kawata, Norio Nakamura, Ryukou Kato

Proceedings Volume 10809, 1080908 (2018) https://doi.org/10.1117/12.2501649

KEYWORDS: Light sources, Free electron lasers, Electron beams, Extreme ultraviolet, Stochastic processes, Extreme ultraviolet lithography, Laser scanners, 3D scanning, Near infrared

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Proceedings Article | 16 October 2017 Presentation

Challenges to realize the EUV-FEL high-power light source for HVM system (Conference Presentation)

Hiroshi Kawata, Norio Nakamura, Eiji Kako, Ryukou Kato, Tsukasa Miyajima

Proceedings Volume 10450, 1045010 (2017) https://doi.org/10.1117/12.2280507

KEYWORDS: Light sources, Free electron lasers, Extreme ultraviolet, Semiconductors, Superconductors, EUV optics, Extreme ultraviolet lithography

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Proceedings Article | 20 January 1993 Paper

Circularly polarized x-ray beamline at 6.5-GeV accumulation ring

Hiroshi Kawata

Proceedings Volume 1740, (1993) https://doi.org/10.1117/12.138695

KEYWORDS: Crystals, X-rays, Monochromators, Magnetism, Compton scattering, Laser crystals, Synchrotron radiation, Microchannel plates, Iron, Liquid crystals

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Showing 5 of 8 publications

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