Dr. Hao Lee Xu Profile

Dr. Hao Lee Xu

Business Development Director at Brewer Science Inc

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Publications (2)

Proceedings Article | 1 April 2009 Paper

Underlayer designs to enhance the performance of EUV resists

Hao Xu, James Blackwell, Todd Younkin, Ke Min

Proceedings Volume 7273, 72731J (2009) https://doi.org/10.1117/12.814223

KEYWORDS: Extreme ultraviolet, Line width roughness, Extreme ultraviolet lithography, Polymers, Scanning electron microscopy, Photoresist materials, Semiconducting wafers, Neodymium, Molecules, Optical lithography

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Proceedings Article | 4 December 2008 Paper

Acid-degradable hyperbranched polymer and its application in bottom anti-reflective coatings

Ramil-Marcelo Mercado, Hao Xu, Joyce Lowes, Jim Meador, Douglas Guerrero

Proceedings Volume 7140, 71402W (2008) https://doi.org/10.1117/12.804743

KEYWORDS: Polymers, Photoresist developing, Polymer thin films, Photoresist materials, Lithography, Coating, Molecules, Bottom antireflective coatings, Electroluminescence, Etching

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