Dr. Haisheng San Profile

Dr. Haisheng San

at Xiamen Univ

SPIE Involvement:

Author

Publications (11)

Proceedings Article | 18 May 2009 Paper

Paper

Micro-machined infrared emitter with metallic photonic crystals structure

Fangqiang Li, Haisheng San, Meijing Cheng, Xuyuan Chen

Proceedings Volume 7284, 728406 (2009) https://doi.org/10.1117/12.832064

KEYWORDS: Silicon, Semiconducting wafers, Infrared radiation, Photonic crystals, Aluminum, Plasmas, Silica, Silicon films, Mid-IR, Etching

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Proceedings Article | 1 May 2008 Paper

Paper

A MEMS-based infrared emitter array for combat identification

Haisheng San, Xuyuan Chen, Peng Xu, Fangqiang Li, Meiying Cheng

Proceedings Volume 6940, 69401T (2008) https://doi.org/10.1117/12.777259

KEYWORDS: Thermography, Infrared radiation, Modulation, Semiconducting wafers, Microelectromechanical systems, Infrared imaging, Silicon, Deep reactive ion etching, Silica, Temperature metrology

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Proceedings Article | 30 April 2008 Paper

Paper

Domain wall resistance in AlFe nanocontact

Peng Xu, Haisheng San, Xuyuan Chen

Proceedings Volume 6959, 695917 (2008) https://doi.org/10.1117/12.777093

KEYWORDS: Resistance, Magnetism, Electron beam lithography, Switches, Gold, Temperature metrology, Iron, Electronic components, Electron transport, Ferromagnetics

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Proceedings Article | 8 January 2008 Paper

Paper

A silicon micromachined infrared emitter based on SOI wafer

Haisheng San, Xuyuan Chen, Meiying Cheng, Fangqiang Li

Proceedings Volume 6836, 68360N (2008) https://doi.org/10.1117/12.755923

KEYWORDS: Thermography, Infrared radiation, Silicon, Semiconducting wafers, Infrared imaging, Modulation, Microelectromechanical systems, Silica, Deep reactive ion etching, Absorption

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Proceedings Article | 4 January 2008 Paper

Paper

Piezoelectric capacitive power generator from vibration energy

Yangjian Zhang, Lin Li, Haisheng San, Xuyuan Chen

Proceedings Volume 6836, 68360Y (2008) https://doi.org/10.1117/12.756131

KEYWORDS: Capacitors, Electrodes, Ferroelectric materials, Energy harvesting, Capacitance, Glasses, Silicon, Aluminum, Platinum, Semiconducting wafers

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Proceedings Article | 4 January 2008 Paper

Paper

Influence of ion implantation on dielectric charging in capacitive RF MEMS switches

Gang Li, Linxian Zhan, Haisheng San, Peng Xu, Xuyuan Chen

Proceedings Volume 6836, 68360J (2008) https://doi.org/10.1117/12.756276

KEYWORDS: Dielectrics, Switches, Microelectromechanical systems, Ion implantation, Ions, Silicon, Silicon films, Capacitors, Low pressure chemical vapor deposition, Reliability

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Proceedings Article | 4 January 2008 Paper

Paper

MEMS for vibration energy harvesting

Lin Li, Yangjian Zhang, Haisheng San, Yinbiao Guo, Xuyuan Chen

Proceedings Volume 6836, 683610 (2008) https://doi.org/10.1117/12.756153

KEYWORDS: Semiconducting wafers, Electrodes, Capacitors, Glasses, Energy harvesting, Microelectromechanical systems, Silicon, Metals, Wind energy, Aluminum

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Proceedings Article | 4 January 2008 Paper

Paper

Investigation of charge accumulation in the dielectric for robust RF MEMS switches

Xuyuan Chen, Ulrik Hanke, Haisheng San, Gang Li, Linxian Zhan

Proceedings Volume 6836, 68360H (2008) https://doi.org/10.1117/12.757939

KEYWORDS: Dielectrics, Switches, Microelectromechanical systems, Metals, Bridges, Electrodes, Interfaces, Ions, Ion implantation, Silicon

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Proceedings Article | 4 January 2008 Paper

Paper

Charge accumulation in composite dielectric layers in capacitive RF MEMS switches

Linxian Zhan, Haisheng San, Gang Li, Peng Xu, Xuyuan Chen

Proceedings Volume 6836, 68360Z (2008) https://doi.org/10.1117/12.756133

KEYWORDS: Dielectrics, Composites, Microelectromechanical systems, Switches, Silicon, Silica, Plasma enhanced chemical vapor deposition, Capacitance, Silicon films, Metals

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Proceedings Article | 4 January 2008 Paper

Paper

Actuation voltage wave-form dependence of charge accumulation in RF MEMS switches

Haisheng San, Linxian Zhan, Peng Xu, Gang Li, Xuyuan Chen

Proceedings Volume 6836, 68360K (2008) https://doi.org/10.1117/12.756390

KEYWORDS: Switches, Dielectrics, Microelectromechanical systems, Bridges, Capacitors, Silicon, Metals, Reliability, Capacitance, Aluminum

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Proceedings Article | 5 December 2005 Paper

Paper

High-speed photodetector characterization using tunable laser by optical heterodyne technique

Haisheng San, Jimin Wen, Liang Xie, Ninghua Zhu, Boxue Feng

Proceedings Volume 6020, 60200A (2005) https://doi.org/10.1117/12.636311

KEYWORDS: Photodetectors, Heterodyning, Tunable lasers, Spectrum analysis, Optics manufacturing, Modulation, Receivers, Optical testing, Sensors, Laser optics

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Showing 5 of 11 publications

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