Prof. Gregory S. Herman Profile

Prof. Gregory S. Herman

at Oregon State University

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Author

Publications (3)

Proceedings Article | 13 March 2018 Presentation + Paper

Surface characterization of tin-based inorganic EUV resists

Ryan Frederick, J. Trey Diulus, Igor Lyubinetsky, Danielle Hutchison, Morgan Olsen, May Nyman, Gregory Herman

Proceedings Volume 10586, 1058607 (2018) https://doi.org/10.1117/12.2297484

KEYWORDS: Oxygen, Tin, Chemistry, X-rays, Annealing, Photoresist materials, Oxides, Extreme ultraviolet, Optical lithography, Extreme ultraviolet lithography

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Proceedings Article | 21 March 2016 Paper

Characterization of HafSOx inorganic photoresists using electron stimulated desorption

Ryan Frederick, Gregory Herman

Proceedings Volume 9779, 97790I (2016) https://doi.org/10.1117/12.2220604

KEYWORDS: Materials processing, Photoresist processing, Photoresist materials, Extreme ultraviolet lithography, Extreme ultraviolet, Chemistry, Electron beam lithography, Electron beams, Spectroscopy, Data modeling, Chemical elements

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Proceedings Article | 17 April 2014 Paper

Characterization of high-resolution HafSOx inorganic resists

R. Oleksak, G. Herman

Proceedings Volume 9048, 90483H (2014) https://doi.org/10.1117/12.2054048

KEYWORDS: Transmission electron microscopy, Electron beam lithography, Electrons, Hafnium, Oxides, Line width roughness, Thin films, Metals, Electron beams, Lithography

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