Prof. Geun Young Yeom Profile

Prof. Geun Young Yeom

Professor at Sungkyunkwan Univ

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Publications (3)

Proceedings Article | 10 April 2024 Poster

EUV sensitivity and PEB stability of Sn-12 clusters for EUVL

Yeo Kyung Kang, Heeju Kim, Sun Jin Lee, Dong-Seok Oh, Yang-Hun Yoon, Chang-Jun Kim, Geun Young Yeom, Chan-Cuk Hwang, Myung-Gil Kim

Proceedings Volume 12957, 129572D (2024) https://doi.org/10.1117/12.3023154

KEYWORDS: Extreme ultraviolet, Extreme ultraviolet lithography, Photoresist materials, Tin, Lithography, Nanostructures, Manufacturing, Light absorption, Industry, Etching

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Proceedings Article | 10 April 2024 Poster

Surface hardening of chemical amplified resist (CAR) type extreme ultraviolet (EUV) photoresist by CS2 plasma for highly selective and low damage patterning

Hee Ju Kim, Won Jun Chang, Geun Young Yeom

Proceedings Volume PC12958, (2024) https://doi.org/10.1117/12.3009948

KEYWORDS: Resistance, Annealing, Heat treatments, Line edge roughness, Photoresist materials, Plasma, Etching, Extreme ultraviolet lithography, Optical lithography, Extreme ultraviolet

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Proceedings Article | 21 March 2017 Paper

Improvement of a block co-polymer (PS-b-PDMS) template etch profile using amorphous carbon layer

JiSoo Oh, Jong Sik Oh, DaIn Sung, SoonMin Yim, SeungWon Song, GeunYoung Yeom

Proceedings Volume 10149, 101490U (2017) https://doi.org/10.1117/12.2258147

KEYWORDS: Etching, Line edge roughness, Lithography, Critical dimension metrology, Plasma etching, Plasma, Optical lithography, Extreme ultraviolet lithography, Double patterning technology

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