A compact laser-induced-breakdown-spectroscopy (LIBS) system for surface elemental analysis using a low-energy,
high-repetition rate Nd:YAG laser as excitation source has been developed. Elemental analyses were performed on
various samples including non-metallic compounds and metal alloys. Fluorine and chlorine could be detected well
qualitatively in different organic materials like Teflon FEP (fluorinated ethylene propylene) or PVC (polyvinyl chloride).
Furthermore, low concentrations of silicon, magnesium and copper in aluminum have been measured and could be
backed up by EDX and XPS analysis. Results were confirmed with a conventional LIBS system using a high-energy,
low-repetition rate Nd:YAG SHG laser operating at 10 Hz with a pulse energy of 200 mJ. Especially the results with
fluorine containing samples are very promising and show that LIBS measurements of non-metallic samples are possible
even at very low pulse energies with a manageable trade-off in signal strength.
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