Dr. Genevieve A. Kane
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 30 April 2023 Presentation
Proceedings Volume 12496, 124960V (2023) https://doi.org/10.1117/12.2657650
KEYWORDS: Metrology, Scanning electron microscopy, Electron microscopes, Extreme ultraviolet, Time metrology, Stochastic processes, Statistical analysis, Critical dimension metrology, Inspection

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