Mr. Ganesh Panaman Profile

Ganesh Panaman

at SUNY/Univ at Albany

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Author

Publications (3)

Proceedings Article | 23 January 2006 Paper

Characterization and fabrication of MOEMS-based diffractive optical switching elements

Jaap Verheggen, Ganesh Panaman, James Castracane

Proceedings Volume 6114, 61140F (2006) https://doi.org/10.1117/12.647806

KEYWORDS: Electrodes, Diffraction, Microopto electromechanical systems, Diffraction gratings, Switching, Aluminum, Gold, Photomasks, Optical switching, Switches

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SPIE Journal Paper | 1 October 2005

Low-power MOEMS components for active optical systems

James Castracane, Dong Yan, Seth Madison, Ganesh Panaman, Bai Xu

JM3, Vol. 4, Issue 04, 041702, (October 2005) https://doi.org/10.1117/12.10.1117/1.2121087

KEYWORDS: Microopto electromechanical systems, Prototyping, Electrodes, Semiconducting wafers, Microelectromechanical systems, Diffraction gratings, Electromechanical design, Optical fabrication, Gold, Polymers

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Proceedings Article | 22 January 2005 Paper

Performance improvements of MOEMS–based diffractive arrays: address isolation and optical switching

Ganesh Panaman, Seth Madison, Michael Sano, James Castracane

Proceedings Volume 5719, (2005) https://doi.org/10.1117/12.591034

KEYWORDS: Electrodes, Microopto electromechanical systems, Optical testing, Microelectromechanical systems, Diffraction gratings, Optical switching, Switching, Oscilloscopes, Optical character recognition, Free space optics

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Micro-Opto-Electro-Mechanical Systems (MOEMS) have found a variety of applications in fields such as telecommunications, spectroscopy and display technology. MOEMS-based optical switching is currently under investigation for the increased flexibility that such devices provide for reconfiguration of the I/O network for inter-chip communication applications. This potential not only adds an additional degree of freedom for adjustment of transmitter/receiver links but also allows for fine alignment of individual channels in the network link. Further, this use of diffractive arrays for specific applications combines beam steering/adjustment capabilities with the inherent wavelength dependence of the diffractive approach for channel separation and de-multiplexing. Research and development has been concentrated on the progression from single MOEMS components to parallel arrays integrated with optical source arrays for a successful feasibility demonstration. Successful development of such an approach will have a major impact of the next generation communication protocols. This paper will focus on the current status of the MOEMS research program for Free Space Optical inter-chip communication at the College of NanoScale Science and Engineering, University at Albany-SUNY (CNSE). New versions of diffractive arrays stemming from the basic MEMS Compound Grating (MCG; patent #5,999,319) have been produced through various fabrication methods including the MUMPs process1. Most MEMS components relying on electrostatic actuation tend to require high actuation voltages (>20V) compared to the typical 5V levels prevalent in conventional integrated circuits. The specific goal is to yield improved performance while minimizing the power consumption of the components. Structural modifications through the variation in the ruling/electrode spacing distance and array wiring layout through individually addressable gratings have been studied to understand effects on the actuation voltage and cross talk, respectively. A detailed overview of the optical and mechanical properties will be included. Modeling results along with the mechanical and optical testing results have been detailed and compared with previously obtained results. Future work focuses on alternate material sets for a reduction in operational voltage, improvements in optical efficiency and technology demonstrators for verification of massively parallel I/O performance.

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