Mr. Frank Senger Profile

Frank Senger

at Fraunhofer-ISIT

SPIE Involvement:

Author

Publications (12)

Proceedings Article | 28 March 2021 Presentation + Paper

Laser beam scanning based AR-display applying resonant 2D MEMS mirrors

Oleg Petrak, Fabian Schwarz, Leon Pohl, Marcel Reher, Christian Janicke, Jan Przytarski, Frank Senger, Jörg Albers, Thorsten Giese, Lars Ratzmann, Peter Blicharski, Stephan Marauska, Thomas von Wantoch, Ulrich Hofmann

Proceedings Volume 11765, 1176503 (2021) https://doi.org/10.1117/12.2579695

KEYWORDS: Microelectromechanical systems, Mirrors, RGB color model, Projection systems, Laser sources, Control systems, Waveguides, Virtual reality, Video, Prototyping

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Proceedings Article | 5 March 2021 Presentation + Paper

Innovative ECDL design based on a resonant MEMS scanner for ultra-fast tuning in the MIR range

Morten Hoppe, Sebastian Schmidtmann, Christian Aβmann, Martin Honsberg, Herve Tatenguem, Tobias Milde, Thomas Schanze, Joachim Sacher, Shanshan Gu-Stoppel, Frank Senger

Proceedings Volume 11697, 1169709 (2021) https://doi.org/10.1117/12.2578913

KEYWORDS: Microelectromechanical systems, Ultrafast phenomena, Scanners, Actuators, Semiconductor lasers, Molecules, Gases, Absorption

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Proceedings Article | 5 March 2021 Presentation + Paper

A design and manufacturing platform for AlScN based highly linear quasi-static MEMS mirrors with large optical apertures

S. Gu-Stoppel, F. Senger, L. Wen, E. Yarar, G. Wille, J. Albers

Proceedings Volume 11697, 116970F (2021) https://doi.org/10.1117/12.2583399

KEYWORDS: Optics manufacturing, Mirrors, Microelectromechanical systems, Design for manufacturability, Glasses, Actuators, Semiconducting wafers, Particles, Humidity

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Proceedings Article | 5 March 2021 Presentation + Paper

A 2D circular-scanning piezoelectric MEMS mirror for laser material processing

F. Senger, S. Gu-Stoppel, L. Wen, J. Albers, M. Timmermann, Stefan Bruns, G. Piechotta, U. Bünting, M. Schulz-Ruhtenberg

Proceedings Volume 11697, 1169704 (2021) https://doi.org/10.1117/12.2584075

KEYWORDS: Microelectromechanical systems, Mirrors, Scanners, Polygon scanners, Laser processing, Beam steering, Superposition, Signal processing, Reflectivity, Position sensors

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Proceedings Article | 28 February 2020 Paper

Resonant 1D MEMS mirror with a total optical scan angle of 180° for automotive LiDAR

Fabian Schwarz, Frank Senger, Jörg Albers, Pauline Malaurie, Christian Janicke, Leon Pohl, Felix Heinrich, Dirk Kaden, Hans-Joachim Quenzer, Fabian Lofink, Andreas Bahr, Thomas von Wantoch, Ulrich Hofmann

Proceedings Volume 11293, 1129309 (2020) https://doi.org/10.1117/12.2546035

KEYWORDS: Mirrors, Microelectromechanical systems, Scanners, LIDAR, Semiconducting wafers, Sensors, Glasses, Laser scanners, Humidity, 3D scanning

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Proceedings Article | 28 February 2020 Presentation + Paper

A bi-axial vacuum-packaged piezoelectric MEMS mirror for smart headlights

F. Senger, J. Albers, U. Hofmann, G. Piechotta, T. Giese, F. Heinrich, T. von Wantoch, S. Gu-Stoppel

Proceedings Volume 11293, 1129305 (2020) https://doi.org/10.1117/12.2542802

KEYWORDS: Microelectromechanical systems, Mirrors, Semiconducting wafers, Wafer bonding, Actuators, Aluminum nitride, Headlamps, Glasses, Silicon, Molybdenum

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Proceedings Article | 15 March 2016 Paper

Modeling of biaxial gimbal-less MEMS scanning mirrors

Thomas von Wantoch, Shanshan Gu-Stoppel, Frank Senger, Christian Mallas, Ulrich Hofmann, Thomas Meurer, Wolfgang Benecke

Proceedings Volume 9760, 976008 (2016) https://doi.org/10.1117/12.2213518

KEYWORDS: Mirrors, Microelectromechanical systems, Finite element methods, Scanners, Micromirrors, Computing systems, Modeling, Laser scanners, Systems modeling, Piezoelectric drives, Piezoelectric thin film actuators, 3D modeling, Control systems, Actuators

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Proceedings Article | 27 February 2015 Paper

Centimeter-scale MEMS scanning mirrors for high power laser application

F. Senger, U. Hofmann, Thomas von Wantoch, C. Mallas, J. Janes, W. Benecke, Patrick Herwig, P. Gawlitza, Moises Ortega Delgado, C. Grune, J. Hannweber, A. Wetzig

Proceedings Volume 9375, 937509 (2015) https://doi.org/10.1117/12.2079600

KEYWORDS: Mirrors, Microelectromechanical systems, Semiconducting wafers, High power lasers, Laser applications, Scanners, Modulation, Electrodes, Laser scanners, 3D scanning

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Proceedings Article | 7 March 2014 Paper

Wafer-level vacuum-packaged two-axis MEMS scanning mirror for pico-projector application

Ulrich Hofmann, Frank Senger, Joachim Janes, Christian Mallas, Vanessa Stenchly, Thomas von Wantoch, Hans-Joachim Quenzer, Manfred Weiss

Proceedings Volume 8977, 89770A (2014) https://doi.org/10.1117/12.2038249

KEYWORDS: Mirrors, Microelectromechanical systems, Packaging, Glasses, Semiconducting wafers, Laser based displays, Electrodes, Modulation, High power lasers, Oscillators

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SPIE Journal Paper | 2 December 2013

Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning

Ulrich Hofmann, Mika Aikio, Joachim Janes, Frank Senger, Vanessa Stenchly, Juergen Hagge, Hans-Joachim Quenzer, Manfred Weiss, Thomas von Wantoch, Christian Mallas, Bernhard Wagner, Wolfgang Benecke

JM3, Vol. 13, Issue 01, 011103, (December 2013) https://doi.org/10.1117/12.10.1117/1.JMM.13.1.011103

KEYWORDS: Mirrors, Microelectromechanical systems, Laser scanners, Roads, Sensors, Laser development, Packaging, Wafer bonding, Actuators

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Proceedings Article | 13 March 2013 Paper

Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning

U. Hofmann, M. Aikio, J. Janes, F. Senger, V. Stenchly, M. Weiss, H.-J. Quenzer, B. Wagner, W. Benecke

Proceedings Volume 8616, 86160C (2013) https://doi.org/10.1117/12.2006189

KEYWORDS: Mirrors, Microelectromechanical systems, Semiconducting wafers, Sensors, Glasses, Silicon, Packaging, Wafer bonding, Wafer-level optics, Neodymium

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Proceedings Article | 14 February 2011 Paper

MEMS scanning laser projection based on high-Q vacuum packaged 2D-resonators

U. Hofmann, C. Eisermann, H.-J. Quenzer, J. Janes, C. Schroeder, O. Schwarzelbach, B. Jensen, L. Ratzmann, T. Giese, F. Senger, J. Hagge, M. Weiss, B. Wagner, W. Benecke

Proceedings Volume 7930, 79300R (2011) https://doi.org/10.1117/12.878676

KEYWORDS: Mirrors, Microelectromechanical systems, Semiconducting wafers, Glasses, Scanners, Silicon, Wafer bonding, Packaging, Electrodes

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Showing 5 of 12 publications

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