Dr. Frank Cerio Profile

Dr. Frank Cerio

at Veeco Instruments Inc

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Author

Publications (3)

Proceedings Article | 26 September 2019 Paper

Interfacial quality of high-reflectivity Mo-Si multilayers for EUV mask blanks

Narasimhan Srinivasan, Katrina Rook, Paul Turner, Tania Henry, Kenji Yamamoto, Devlin Donnelly, Thu Van Nguyen, Vincent Ip, Meng Lee, Sandeep Kohli, Frank Cerio, Adrian Devahasayam

Proceedings Volume 11147, 111470N (2019) https://doi.org/10.1117/12.2536935

KEYWORDS: Silicon, Molybdenum, Multilayers, Extreme ultraviolet, Atomic force microscopy, Photomasks, Surface roughness, Ion beams, Reflectivity, Interfaces

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Proceedings Article | 26 March 2019 Presentation + Paper

Ion beam etching of new absorber materials for sub-5nm EUV masks

Narasimhan Srinivasan, Katrina Rook, Vincent Ip, Meng Lee, Sandeep Kohli, Frank Cerio, Adrian Devasahayam

Proceedings Volume 10957, 109570O (2019) https://doi.org/10.1117/12.2515098

KEYWORDS: Etching, Ion beams, Photomasks, Extreme ultraviolet, Nickel, Optical lithography, Ruthenium, Critical dimension metrology, Ions, Cobalt

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Proceedings Article | 3 October 2018 Presentation + Paper

Ion beam processing for critical EUV photomask process steps: mask blank deposition and photomask absorber etch

Katrina Rook, Meng Lee, Narasimhan Srinivasan, Vincent Ip, Sandeep Kohli, Mathew Levoso, Frank Cerio, Adrian Devasahayam

Proceedings Volume 10809, 108090F (2018) https://doi.org/10.1117/12.2501832

KEYWORDS: Etching, Ruthenium, Nickel, Ion beams, Extreme ultraviolet, Photomasks, Optical lithography, Ions, Photoresist materials, Multilayers

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