Dr. Farzad Farhadzadeh
Design engineer at ASML Netherlands BV
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 22 February 2021 Presentation + Paper
Kaustuve Bhattacharyya, Ken Chang, Jeff Lin, Simon Mathijssen, Marc Noot, Farzad Farhadzadeh, Arie Den Boef, Momo Lin, Frank Sun, Justin Huang, Sax Liao, Edison Wang, Jason Hung, Benny Gosali, Wilson Liu, Cathy Wang, Matthew Mclaren
Proceedings Volume 11611, 116110C (2021) https://doi.org/10.1117/12.2583861
KEYWORDS: Overlay metrology, Metrology, Etching, Data modeling, Model-based design, Measurement devices, Lithography

Proceedings Article | 22 February 2021 Poster + Presentation + Paper
Chia Hung Chen, Sheng-Tsung Tsao, Jie Du, Wenkang Song, Hongwei Zhu, Ji-Ling Hou, Longfei Shen, Sunny Xia, Simon Mathijssen, Marc Noot, Farzad Farhadzadeh, Kimi Yang, Xing Ma, Zhi-Qiang Tang, Jing Wang, Yu Liu, David Xu, Herman Heijmerikx, Eason Su, Elliott Mc Namara, Kaustuve Bhattacharyya
Proceedings Volume 11611, 116112Z (2021) https://doi.org/10.1117/12.2583818
KEYWORDS: Metrology, Overlay metrology, High volume manufacturing, Front end of line, Detection and tracking algorithms

Proceedings Article | 20 March 2020 Paper
Simon Mathijssen, Herman Heijmerikx, Farzad Farhadzadeh, Marc Noot, Lineke van der Sneppen, Longfei Shen, Fei Jia, Jolly Xu, Huajun Qin, Arie den Boef, Elliott Mc Namara, Kaustuve Bhattacharyya, Chao Fang, Yaobin Feng
Proceedings Volume 11325, 113252L (2020) https://doi.org/10.1117/12.2551899
KEYWORDS: Diffraction, Overlay metrology, Metrology, Diffraction gratings, Semiconducting wafers, Polarization, Silicon, Detection and tracking algorithms

Proceedings Article | 20 March 2020 Presentation + Paper
Proceedings Volume 11325, 113251J (2020) https://doi.org/10.1117/12.2551676
KEYWORDS: Overlay metrology, Semiconducting wafers, Calibration, Metrology, Diffraction gratings, Polarization, Optical testing, Etching, Electronics, Optical lithography

Proceedings Article | 19 February 2014 Paper
Svyatoslav Voloshynovskiy, Maurits Diephuis, Dimche Kostadinov, Farzad Farhadzadeh, Taras Holotyak
Proceedings Volume 9028, 902807 (2014) https://doi.org/10.1117/12.2038149
KEYWORDS: Visualization, Databases, Information security, Computer programming, Binary data, Systems modeling, Phase modulation, Statistical analysis, Statistical modeling, Computing systems

Showing 5 of 6 publications
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