Mr. Farmer Wang Profile

Farmer Wang

at Shanghai Jiao Tong Univ

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Publications (1)

Proceedings Article | 13 December 2021 Paper

3D surface topography measurement of diffractive optical element based on white light interferometry stitching method

Wenwen Lu, Shanyong Chen, Jingyang Guo, Xu Wang, Weiwei Chen

Proceedings Volume 12072, 120720R (2021) https://doi.org/10.1117/12.2604523

KEYWORDS: 3D metrology, Diffractive optical elements, Optical components, Interferometers, Optical interferometry, Measurement devices, Defense technologies, Optical testing, Objectives, Cameras

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