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Erina Yoshida
at Cornell Univ
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Publications (1)
Proceedings Article | 10 April 2024 Presentation
Sequence-defined polypeptoids as photoresists with molecular precision for EUV lithography
Chenyun Yuan, Erina Yoshida, Cameron Adams, Rachel Segalman, Christopher Ober
Proceedings Volume 12957, 129570S (2024) https://doi.org/10.1117/12.3011864
KEYWORDS: Photoresist materials, Extreme ultraviolet lithography, Metals, Stochastic processes, Chemical species, Switches, Solubility, Lithography, Light absorption, Transistors
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