Dr. Enrique Iborra Profile

Dr. Enrique Iborra

at Univ Politécnica de Madrid

SPIE Involvement:

Author

Publications (5)

Proceedings Article | 5 May 2011 Paper

Resonant piezoelectric AlN-actuated microcantilevers for detection of antigen/antibody interactions

M. Oliver, J. Hernando-García, A. Ababneh, H. Seidel, U. Schmid, J. Olivares, E. Iborra, P. Pobedinskas, K. Haenen, J. L. Sánchez-Rojas

Proceedings Volume 8066, 80661A (2011) https://doi.org/10.1117/12.887010

KEYWORDS: Liquids, Aluminum nitride, Silicon, Biosensors, Zinc oxide, Ferroelectric materials, Microelectromechanical systems, Resonators, Latex, Atomic force microscopy

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Proceedings Article | 19 May 2009 Paper

Silicon oxide sacrificial layers deposited by pulsed-DC magnetron sputtering for MEMS applications

Sheila González-Castilla, Jimena Olivares, Marta Clement, Lucía Vergara, Laura Pulido, Enrique Iborra, Jesús Sangrador

Proceedings Volume 7362, 73620X (2009) https://doi.org/10.1117/12.821485

KEYWORDS: Silicon, Etching, Oxides, Sputter deposition, Oxygen, Silicon films, Silica, Absorption, Microelectromechanical systems, Surface micromachining

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Proceedings Article | 21 April 2006 Paper

Tunable mechanical resonator with aluminium nitride piezoelectric actuation

J. Olivares, J. Malo, S. González, E. Iborra, I. Izpura, M. Clement, A. Sanz-Hervás, J. Sánchez-Rojas, P. Sanz

Proceedings Volume 6186, 61860K (2006) https://doi.org/10.1117/12.664444

KEYWORDS: Resonators, Aluminum nitride, Bridges, Laser interferometry, Photodiodes, Sensors, Electrodes, Avalanche photodetectors, Dielectrics, Capacitors

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Proceedings Article | 1 July 2005 Paper

Ge and GeOx films as sacrificial layer for MEMS technology based on piezoelectric AlN: etching and planarization processes

J. Sangrador, J. Olivares, E. Iborra, L. Vergara, M. Clement, A. Sanz-Hervas

Proceedings Volume 5836, (2005) https://doi.org/10.1117/12.608244

KEYWORDS: Etching, Germanium, Oxygen, Silicon, Chemical mechanical planarization, Polishing, Microelectromechanical systems, Aluminum nitride, Sputter deposition, Particles

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Proceedings Article | 1 July 2005 Paper

Simulation, fabrication, and testing of aluminium nitride piezoelectric microbridges

J. Olivares, M. Clement, E. Iborra, L. Vergara, J. L. Sanchez-Rojas, J. Vazquez, P. Sanz

Proceedings Volume 5836, (2005) https://doi.org/10.1117/12.608228

KEYWORDS: Bridges, Aluminum nitride, Silicon, Electrodes, Microelectromechanical systems, Finite element methods, Molybdenum, 3D modeling, Actuators, Optical lithography

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Conference Committee Involvement (5)

Smart Sensors, Actuators, and MEMS VIII

8 May 2017 | Barcelona, Spain

Smart Sensors, Actuators, and MEMS VII

4 May 2015 | Barcelona, Spain

Smart Sensors, Actuators, and MEMS VI

24 April 2013 | Grenoble, France

Smart Sensors, Actuators and MEMS

18 April 2011 | Prague, Czech Republic

Smart Sensors, Actuators and MEMS

4 May 2009 | Dresden, Germany

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