Prof. Ehrenfried Zschech Profile

Prof. Ehrenfried Zschech

at deepXscan

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Publications (2)

Proceedings Article | 21 August 2009 Paper

Surface-sensitive strain analysis of Si/SiGe line structures by Raman and UV-Raman spectroscopy

Marek Roelke, Michael Hecker, Peter Hermann, David Lehninger, Yvonne Ritz, Ehrenfried Zschech, Victor Vartanian

Proceedings Volume 7405, 74050S (2009) https://doi.org/10.1117/12.830866

KEYWORDS: Silicon, Raman spectroscopy, Ultraviolet radiation, Finite element methods, Visible radiation, Spectroscopy, Strain analysis, CMOS technology, Transistors, Manufacturing

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Proceedings Article | 2 September 1997 Paper

Rapid in-fab monitoring of ion implant doses using total x-ray fluorescence

Cornelia Weiss, Tim Hossain, Ehrenfried Zschech, Brian MacDonald

Proceedings Volume 3215, (1997) https://doi.org/10.1117/12.284675

KEYWORDS: X-rays, X-ray fluorescence spectroscopy, Silicon, Reflectivity, Ions, Nondestructive evaluation, Semiconducting wafers, Luminescence, Ion implantation, Manufacturing

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