Dr. Dmitriy V. Likhachev
Senior Research Scientist at Tokyo Electron America Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 24 March 2009 Paper
Proceedings Volume 7272, 727241 (2009) https://doi.org/10.1117/12.814246
KEYWORDS: Scatterometry, Metrology, Semiconducting wafers, Data modeling, Critical dimension metrology, Scanning electron microscopy, Optical properties, Scatter measurement, Cadmium, Lithography

Proceedings Article | 25 March 2008 Paper
Yan Chen, Masahiro Yamamoto, Dmitriy Likhachev, Gang He, Akihiro Sonoda, Vi Vuong
Proceedings Volume 6922, 69223R (2008) https://doi.org/10.1117/12.773133
KEYWORDS: Scatterometry, Critical dimension metrology, Dielectrics, Semiconducting wafers, Refractive index, Optical properties, Scatter measurement, Data modeling, Semiconductor manufacturing, Process modeling

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top