Dr. Delia Maria Fugger-Schafhauser
at Silicon Austria Labs GmbH
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 13 June 2023 Paper
Tibor Bereczki, Yucheng Zhang, Emir Gušo, Delia Fugger, Barbara Oliveira, Ali Roshanghias, Nikolai Andrianov, Norbert Cselyuszka
Proceedings Volume 12532, 125320Y (2023) https://doi.org/10.1117/12.2663913
KEYWORDS: Glasses, Sodium, Silicon, Wafer bonding, Laser induced breakdown spectroscopy, Semiconducting wafers, Laser ablation, Emission spectrum, Pulsed laser operation, Laser bonding

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