Dr. David P. Mancini
Process Engineer at Motorola Solutions Inc
SPIE Involvement:
Author
Publications (21)

Proceedings Article | 6 December 2004 Paper
Kevin Nordquist, William Dauksher, David Mancini, Douglas Resnick, Harald Hess, Donald Pettibone, David Adler, Kirk Bertsche, Roy White, Jeffrey Csuy, David Lee
Proceedings Volume 5567, (2004) https://doi.org/10.1117/12.569846
KEYWORDS: Inspection, Scanning electron microscopy, Photomasks, Semiconducting wafers, Oxides, Lithography, Etching, Deep ultraviolet, Quartz, Atomic force microscopy

Proceedings Article | 2 June 2004 Paper
Proceedings Volume 5504, (2004) https://doi.org/10.1117/12.568035
KEYWORDS: Electron beam lithography, Lithography, Photomasks, Photoresist processing, Etching, Chromium, Beam shaping, Nanotechnology, Image processing, Semiconducting wafers

Proceedings Article | 20 May 2004 Paper
Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.537380
KEYWORDS: Semiconducting wafers, Etching, Optical alignment, Lithography, Lamps, Nanoimprint lithography, Scanning electron microscopy, Overlay metrology, Manufacturing, Mercury

Proceedings Article | 20 May 2004 Paper
Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.536216
KEYWORDS: Etching, Polymerization, Molecules, Monte Carlo methods, Finite element methods, Lithography, Ultraviolet radiation, Molecular interactions, Scanning electron microscopy, Optical lithography

Proceedings Article | 20 May 2004 Paper
Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.537382
KEYWORDS: Etching, Lithography, Silicon, Critical dimension metrology, Semiconducting wafers, Scanning electron microscopy, Quartz, Oxides, Photomasks, Printing

Showing 5 of 21 publications
Conference Committee Involvement (2)
Emerging Lithographic Technologies VIII
24 February 2004 | Santa Clara, California, United States
Emerging Lithographic Technologies VII
25 February 2003 | Santa Clara, California, United States
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