Polymers have become an important material group in fabricating discrete photonic components and integrated optical devices. This is due to their good properties: high optical transmittance, versatile processability at relative low temperatures and potential for low-cost production. Recently, nanoimprinting or nanoimprint lithography (NIL) has obtained a plenty of research interest. In NIL, a mould is pressed against a substrate coated with a moldable material. After deformation of the material, the mold is separated and a replica of the mold is formed. Compared with conventional lithographic methods, imprinting is simple to carry out, requires less-complicated equipment and can provide high-resolution with high throughput. Nanoimprint lithography has shown potential to become a method for low-cost and high-throughput fabrication of nanostructures. We show the development process of nano-structured, large-area multi-parameter sensors using Photonic Crystal (PC) and Surface Enhanced Raman Scattering (SERS) methodologies for environmental and pharmaceutical applications. We address these challenges by developing roll-to-roll (R2R) UV-nanoimprint fabrication methods. Our development steps are the following: Firstly, the proof of concept structures are fabricated by the use of wafer-level processes in Si-based materials. Secondly, the master molds of successful designs are fabricated, and they are used to transfer the nanophotonic structures into polymer materials using sheet-level UV-nanoimprinting. Thirdly, the sheet-level nanoimprinting processes are transferred to roll-to-roll fabrication. In order to enhance roll-to-roll manufacturing capabilities, silicone-based polymer material development was carried out. In the different development phases, Photonic Crystal and SERS sensor structures with increasing complexities were fabricated using polymer materials in order to enhance sheet-level and roll-to-roll manufacturing processes. In addition, chemical and molecular imprint (MIP) functionalization methods were applied in the sensor demonstrators. In this paper, the process flow in fabricating large-area nanophotonic structures by the use of sheet-level and roll-to-roll UV- nanoimprinting is reported.
Surface-enhanced Raman scattering (SERS) can be used to amplify Raman signals by several orders of magnitude, by
utilizing Plasmon polariton (photonic and surface Plasmon mode) coupling to test molecules disposed on a textured
metallo-dielectric surface. Previously the 'KlariteTM' substrate consisting of an inverted array of square pyramidal
nanostructures patterned onto a Silicon substrate has been demonstrated to afford highly reproducible SERS signals. In
this paper, we investigate a new rectangular lattice arrangement and investigate the effect of aspect ratio on SERS
enhancement factor. Nanostructured test substrates are coated with gold by thermal evaporation, followed by a
monolayer of benzenethiol or benzyl mercaptan which provides a stable test molecule for signal enhancement
comparison. SERS signals are analyzed with Renishaw (MS20) Invia Raman Spectrometer at a wavelength of 785nm.
The resulting SERS enhancement shows an improvement in signal level of 786% (~ 8 times) compared to standard
Klarite. In addition to high enhancement we are able to maintain less than 8.8% relative standard deviation for the peak
signal.
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