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Dr. Daniel Grimm
at JENOPTIK Optical Systems GmbH
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Author
Publications (1)
Proceedings Article | 23 March 2020 Paper
Realization of thermally stable transmissive optical elements for the EUV wavelength range
G. Hergenhan, J. Taubert, D. Grimm, M. Tilke, M. Panitz, C. Ziener
Proceedings Volume 11323, 113232D (2020) https://doi.org/10.1117/12.2551869
KEYWORDS: Optical components, Silicon, Extreme ultraviolet, Etching, Isotropic etching, Chemical elements, Extreme ultraviolet lithography, Chromium, Ultra low expansion glass
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