In this study, we address the challenge of enhancing image quality and spatial resolution in computed tomography (CT) imaging by introducing simulation and fabrication of high aspect ratio, point-like transmission targets. Utilizing advanced electroplating techniques, traditionally employed in the fabrication of Through Substrate Via (TSV) interconnects for CMOS circuitry, we successfully embed copper targets within silicon substrates. This method allows us to create high-aspect- ratio features specifically designed for x-ray transmission targets, resulting in micro targets that exhibit a volume increase compared to conventional evaporated surface targets. Furthermore, we present simulation results of the x-ray spectrum generated by these targets, demonstrating their potential to significantly improve both image quality and spatial resolution in CT applications. Our findings suggest that leveraging advanced fabrication techniques can open new avenues for the development of enhanced imaging technologies in medical diagnostics and beyond.
We present a methodology to distinguish between absorptive and scattering losses in SiN optical waveguide resonators by measuring the thermo-optic redshift in resonant wavelength and deducing absorption losses using thermal properties determined through the differential 3ω method. This information offers researchers valuable insights for improving device performance and optimizing fabrication processes. We demonstrate results on the effect of a 650oC thermal anneal on R=120um whispering-gallery mode microring resonators fabricated using N-rich PECVD SiN with n=1.92 at 800nm, which reduced total losses from 1.4dB/cm to 0.64dB/cm at 780nm and yielded an intrinsic-Q of 1.1 million, due primarily to decreased absorption losses.
We report on the design and performance of single-frequency VCSELs that are electro-optically tunable in the 852nm wavelength range. Electro-optic tuning of the index of refraction is achieved by changing the reverse-bias electric field in a secondary p-i-n junction that contains coupled quantum wells. The electro-optic tuning is enhanced by putting the index-tuning region in a secondary cavity of a dual-cavity VCSEL. Electro-optic tuning can achieve 1nm of wavelength tuning without changing laser power and can operate at modulation frequencies up to 1GHz.
Applications such as counterfeit identification, quality control, and non-destructive material identification benefit from improved spatial and compositional analysis. X-ray Computed Tomography is used in these applications but is limited by the X-ray focal spot size and the lack of energy-resolved data. Recently developed hyperspectral X-ray detectors estimate photon energy, which enables composition analysis but lacks spatial resolution. Moving beyond bulk homogeneous transmission anodes toward multi-metal patterned anodes enables improvements in spatial resolution and signal-to-noise ratios in these hyperspectral X-ray imaging systems. We aim to design and fabricate transmission anodes that facilitate confirmation of previous simulation results. These anodes are fabricated on diamond substrates with conventional photolithography and metal deposition processes. The final transmission anode design consists of a cluster of three disjoint metal bumps selected from molybdenum, silver, samarium, tungsten, and gold. These metals are chosen for their k-lines, which are positioned within distinct energy intervals of interest and are readily available in standard clean rooms. The diamond substrate is chosen for its high thermal conductivity and high transmittance of X-rays. The feature size of the metal bumps is chosen such that the cluster is smaller than the 100 µm diameter of the impinging electron beam in the X-ray tube. This effectively shrinks the X-ray focal spot in the selected energy bands. Once fabricated, our transmission anode is packaged in a stainless-steel holder that can be retrofitted into our existing X-ray tube. Innovations in anode design enable an inexpensive and simple method to improve existing X-ray imaging systems.
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