Dr. Ci Song Profile

Dr. Ci Song

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Proceedings Article | 11 January 2019 Paper

Research on combined surface modification of single crystal silicon cylindrical mirror

Wanli Zhang, Feng Shi, Yifan Dai, Ci Song, Ye Tian

Proceedings Volume 10837, 1083717 (2019) https://doi.org/10.1117/12.2504844

KEYWORDS: Polishing, Mirrors, Surface finishing, Silicon, Crystals, Ion beam finishing, Ion beams, Particles, Photovoltaics, Liquids

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This article introduces the modification of single crystal silicon cylindrical mirror that combined immersed CCOS polishing with IBF polishing. In the processing of smoothing and modifying, the quality of the mirror’s surface has been further improved. In this experiment, we optimize the CCOS polishing process and improve the traditional CCOS polishing apparatus to polish the single crystal silicon convex cylindrical mirror. During the CCOS polishing process, the parameter were set as follows: pressure 0.4kPa, speed 25 r/min, polishing liquid concentration 4.5% (pH 10), polishing time 20 min. After polishing by CCOS, IBF is used on its heels. The parameter were set as follows: energy 1000-1200eV (Ar⁺ ion beam with low energy), incident angle of ion beam 90°, polishing time 30 min. The immersed CCOS polishing process and IBF polishing process iterated repeatedly until the surface quality of the single crystal silicon convex cylindrical mirror meets the requirement. After the polishing process, the sub aperture stitching method and Zygo interferometer are used to detect the surface. The PV value of the single crystal silicon convex cylindrical mirror is 0.265 lambda, the roughness is 0.679nm the residual Zernike is 70.5 nm after testing. The errors over the whole frequency band were significantly reduced. It could be seen from the above that the single crystal silicon convex cylindrical mirror had high accuracy and better profile on the surface after polishing process. The error over the whole frequency band also converged obviously. Therefore, the method that had been described in this paper could be used for the surface modification of single crystal silicon cylindrical mirror.

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